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Fundamental Principles of Engineering Nanometrology - Richard Leach

By Richard Leach

Release Date: 2009-09-03

Genre: Electrical Engineering

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Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.
- Provides a basic introduction to measurement and instruments

- Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force

- Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments)

- Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties)

- Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge

Fundamental Principles of Engineering Nanometrology - Richard Leach

By Richard Leach

Release Date: 2009-09-03

Genre: Electrical Engineering

(0 ratings)
Read Download
Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.
- Provides a basic introduction to measurement and instruments

- Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force

- Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments)

- Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties)

- Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge

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